Coating uniformity and device applicability of spin coated sol-gel PZT films

Overview of attention for article published in Microelectronic Engineering, December 1995

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Sol-gel precursors and methods for making lead-based perovskite films

Grant US-9431598-B2

United States of America

Piezoelectric microcantilevers and uses in atomic force microscopy

Grant US-7992431-B2

United States of America

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