Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation

Overview of attention for article published in Journal of Micromechanics & Microengineering, May 2003

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Method and device for acoustic analysis of microporosities in a material such as concrete…

Grant US-9074985-B2

United States of America

Hermeticity sensor and related method

Grant US-8528397-B2

United States of America

Thermally induced single-use valves and method of use

Grant US-7958906-B2

United States of America

Microelectromechanical (MEM) fluid health sensing device and fabrication method

Grant US-7328604-B2

United States of America

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