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Characterization of titanium nitride etch rate and selectivity to silicon dioxide in a Cl2 helicon-wave plasma

Overview of attention for article published in Journal of Vacuum Science & Technology: Part B, March 2001
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6 patents

Readers on

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36 Mendeley
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Article details
Title
Characterization of titanium nitride etch rate and selectivity to silicon dioxide in a Cl2 helicon-wave plasma
Published in
Journal of Vacuum Science & Technology: Part B, March 2001
DOI 10.1116/1.1342866
Authors

H. K. Chiu, T. L. Lin, Y. Hu, K. C. Leou, H. C. Lin, M. S. Tsai, T. Y. Huang

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Timeline Attention over time Attention Score history
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 36 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Geographical breakdown
Country Count As %
Germany 1 3%
Canada 1 3%
Belgium 1 3%
Unknown 33 92%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 11 31%
Researcher 5 14%
Student > Master 4 11%
Professor > Associate Professor 3 8%
Student > Bachelor 2 6%
Other 3 8%
Unknown 8 22%
Readers by discipline
Readers by discipline Count As %
Engineering 15 42%
Physics and Astronomy 5 14%
Materials Science 5 14%
Chemical Engineering 2 6%
Chemistry 1 3%
Other 0 0%
Unknown 8 22%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 25 November 2025.
All research outputs
#12,345,312
of 34,364,397 outputs
Outputs from Journal of Vacuum Science & Technology: Part B
#3,065
of 9,674 outputs
Outputs of similar age
#26,665
of 61,675 outputs
Outputs of similar age from Journal of Vacuum Science & Technology: Part B
#13
of 32 outputs
Altmetric has tracked 34,364,397 research outputs across all sources so far. This one is in the 38th percentile – i.e., 38% of other outputs scored the same or lower than it.
So far Altmetric has tracked 9,674 research outputs from this source. They receive a mean Attention Score of 4.3. This one is in the 12th percentile – i.e., 12% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 61,675 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 8th percentile – i.e., 8% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 32 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.