Tunable coupling regimes of silicon microdisk resonators using MEMS actuators

Overview of attention for article published in Optics Express Online, January 2006

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patent: 17 patents

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So far, Altmetric has seen 17 patents that reference this research output.

Compact micro electrical mechanical actuated ring-resonator

Grant US-11698487-B2

United States of America

11 Jul 2023

Nanomechanical photonic devices

Grant US-9341779-B2

United States of America

17 May 2016

Waveguide devices with supporting anchors

Grant US-9274277-B2

United States of America

01 Mar 2016

Hitless tuning and switching of optical resonator amplitude and phase responses

Grant US-8655114-B2

United States of America

18 Feb 2014

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