A molded surface-micromachining and bulk etching release (MOSBE) fabrication platform on (1 1 1) Si for MOEMS

Overview of attention for article published in Journal of Micromechanics & Microengineering, January 2006

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Electrothermal microactuator for large vertical displacement without tilt or lateral shift

Grant US-8776514-B2

United States of America

MEMS capacitive microphone

Grant US-8436435-B2

United States of America

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