3D high aspect ratio micro structures fabricated by one step UV lithography

Overview of attention for article published in Journal of Micromechanics & Microengineering, January 2007

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Method of forming 3D micro structures with high aspect ratios

Grant US-7947430-B2

United States of America

Field emission array having carbon microstructures and method of manufacturing the same

Application JP-2010532915-A

Japan

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