Method of fabricating a capacitive environment sensor Grant US-8852983-B1 United States of America 07 Oct 2014
Method, apparatus, and system for micromechanical gas chemical sensing capacitor Grant US-8471304-B2 United States of America 25 Jun 2013
Methods, apparatuses, and systems for micromechanical gas chemical sensing capacitor Grant US-8410562-B2 United States of America 02 Apr 2013