High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

Overview of attention for article published in Journal of Microelectromechanical Systems, April 2012

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Mechanical resonator with a spring-mass system comprising a phase-change material

Grant US-10090821-B2

United States of America

Mechanical resonator with a spring-mass system comprising a phase-change material

Grant US-9887685-B2

United States of America

Mechanical resonator with a spring-mass system comprising a phase-change material

Grant US-9584092-B2

United States of America

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