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Design of a sampling strategy for measuring and compensating for overlay errors in semiconductor manufacturing

Overview of attention for article published in International Journal of Production Research, November 2010
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Mentioned by

patent
1 patent

Readers on

mendeley
6 Mendeley
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Article details
Title
Design of a sampling strategy for measuring and compensating for overlay errors in semiconductor manufacturing
Published in
International Journal of Production Research, November 2010
DOI 10.1080/0020754031000087256
Authors

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 6 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
Unknown 6 100%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Professor 2 33%
Researcher 1 17%
Student > Master 1 17%
Unknown 2 33%
Readers by discipline
Readers by discipline Count As %
Business, Management and Accounting 1 17%
Decision Sciences 1 17%
Engineering 1 17%
Unknown 3 50%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 28 November 2017.
All research outputs
#7,567,797
of 23,081,466 outputs
Outputs from International Journal of Production Research
#147
of 1,332 outputs
Outputs of similar age
#36,146
of 100,737 outputs
Outputs of similar age from International Journal of Production Research
#8
of 45 outputs
Altmetric has tracked 23,081,466 research outputs across all sources so far. This one is in the 44th percentile – i.e., 44% of other outputs scored the same or lower than it.
So far Altmetric has tracked 1,332 research outputs from this source. They receive a mean Attention Score of 2.1. This one has gotten more attention than average, scoring higher than 71% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 100,737 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 25th percentile – i.e., 25% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 45 others from the same source and published within six weeks on either side of this one. This one is in the 24th percentile – i.e., 24% of its contemporaries scored the same or lower than it.