Generating large-area uniform microwave field for plasma excitation

Overview of attention for article published in Physics of Plasmas, March 2012

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So far, Altmetric has seen 10 patents that reference this research output.

Rectangular waveguide mode converter and power distribution synthesizer

Grant CN-114256569-B

China

08 Nov 2022

Plasma reactor with electrode filaments extending from ceiling

Grant US-11424104-B2

United States of America

23 Aug 2022

Plasma reactor with electrode assembly for moving substrate

Grant US-11355321-B2

United States of America

07 Jun 2022

Rectangular waveguide mode converter and power distribution synthesizer

Application CN-114256569-A

China

29 Mar 2022

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