Fluid handling device and fluid handling system Grant US-12011717-B2 United States of America 18 Jun 2024
FLUID HANDLING DEVICE AND FLUID HANDLING SYSTEM Application US-20230097798-A1 United States of America 30 Mar 2023
Micro electrical mechanical system (MEMS) valve Grant US-11187349-B2 United States of America 30 Nov 2021
Micro electrical mechanical system (MEMS) valve Grant US-10612691-B2 United States of America 07 Apr 2020