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Closed-loop adaptive control for electrostatically driven torsional micromirrors

Overview of attention for article published in Journal of Micro/Nanolithography, MEMS, and MOEMS, October 2005
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About this Attention Score

  • Above-average Attention Score compared to outputs of the same age (61st percentile)
  • Good Attention Score compared to outputs of the same age and source (72nd percentile)

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