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Semiconductor Lithography : Principles, Practices, and Materials

Overview of attention for book
Overall attention for this book and its chapters
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Mentioned by

syllabi
2 institutions with syllabi

Citations

dimensions_citation
375 Dimensions

Readers on

mendeley
69 Mendeley
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Title
Semiconductor Lithography : Principles, Practices, and Materials
Published by
Springer US, December 2012
DOI 10.1007/978-1-4613-0885-0
ISBNs
978-1-4613-0885-0, 978-1-4612-8228-0
Authors

Moreau, Wayne M.

Mendeley readers

The data shown below were compiled from readership statistics for 69 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 69 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 14 20%
Student > Bachelor 7 10%
Student > Master 6 9%
Student > Doctoral Student 3 4%
Researcher 2 3%
Other 2 3%
Unknown 35 51%
Readers by discipline Count As %
Materials Science 11 16%
Chemistry 8 12%
Physics and Astronomy 6 9%
Engineering 4 6%
Chemical Engineering 2 3%
Other 2 3%
Unknown 36 52%