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Semiconductor Lithography : Principles, Practices, and Materials

Overview of attention for book
Attention for Chapter 9: Radiation Exposure
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Citations

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2 Mendeley
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Chapter title
Radiation Exposure
Chapter number 9
Book title
Semiconductor Lithography
Published by
Springer, Boston, MA, January 1988
DOI 10.1007/978-1-4613-0885-0_9
Book ISBNs
978-1-4612-8228-0, 978-1-4613-0885-0
Authors

Wayne M. Moreau, Moreau, Wayne M.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Student > Bachelor 1 50%
Student > Ph. D. Student 1 50%
Readers by discipline Count As %
Physics and Astronomy 1 50%
Engineering 1 50%