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So far, Altmetric has seen
this research output assigned in 1 syllabus from an institution on Open Syllabus Project.
Ion Implantation and Synthesis of Materials
Overview of attention for book
Table of Contents
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Altmetric BadgeBook Overview
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Altmetric BadgeChapter 1 General Features and Fundamental Concepts
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Altmetric BadgeChapter 2 Particle Interactions
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Altmetric BadgeChapter 3 Dynamics of Binary Elastic Collisions
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Altmetric BadgeChapter 4 Cross-Section
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Altmetric BadgeChapter 5 Ion Stopping
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Altmetric BadgeChapter 6 Ion Range and Range Distribution
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Altmetric BadgeChapter 7 Displacements and Radiation Damage
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Altmetric BadgeChapter 8 Channeling
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Altmetric BadgeChapter 9 Doping, Diffusion and Defects in Ion-Implanted Si
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Altmetric BadgeChapter 10 Crystallization and Regrowth of Amorphous Si
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Altmetric BadgeChapter 11 Si Slicing and Layer Transfer: Ion-Cut
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Altmetric BadgeChapter 12 Surface Erosion During Implantation: Sputtering
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Altmetric BadgeChapter 13 Ion-Induced Atomic Intermixing at the Interface: Ion Beam Mixing
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Altmetric BadgeChapter 14 Application of Ion Implantation Techniques in CMOS Fabrication
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Altmetric BadgeChapter 15 Ion implantation in CMOS Technology: Machine Challenges