Manganese oxide hard mask for etching dielectric materials Grant US-9472457-B2 United States of America 18 Oct 2016
Manganese oxide hard mask for etching dielectric materials Grant US-9142488-B2 United States of America 22 Sep 2015
Corrosion/etching protection in integration circuit fabrications Grant US-9054109-B2 United States of America 09 Jun 2015