↓ Skip to main content

Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer

Overview of attention for article published in Microelectronic Engineering, May 2023
Altmetric Badge

About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • One of the highest-scoring outputs from this source (#8 of 2,003)
  • High Attention Score compared to outputs of the same age (89th percentile)
  • High Attention Score compared to outputs of the same age and source (80th percentile)

Mentioned by

news
2 news outlets

Citations

dimensions_citation
1 Dimensions

Readers on

mendeley
2 Mendeley