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3D to 2D perspectives - Traditional and new doping and metrology challenges at the nanoscale

Overview of attention for article published in Materials Science in Semiconductor Processing, August 2023
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About this Attention Score

  • Above-average Attention Score compared to outputs of the same age (60th percentile)
  • Good Attention Score compared to outputs of the same age and source (77th percentile)

Mentioned by

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3 X users

Citations

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3 Dimensions

Readers on

mendeley
9 Mendeley
Summary X Dimensions citations
So far, Dimensions has found 3 publications that cite this research output.

3

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