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| Chapter title |
VLSI process engineering operations
|
|---|---|
| Chapter number | 5 |
| Book title |
Introduction to VLSI Process Engineering
|
| Published by |
Springer Netherlands, January 1993
|
| DOI | 10.1007/978-94-011-1562-9_5 |
| Book ISBNs |
978-9-40-104682-4, 978-9-40-111562-9
|
| Authors |
The Society of Chemical Engineers of Japan |
| Editors |
The Society of Chemical Engineers of Japan |