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Introduction to VLSI Process Engineering

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Attention for Chapter 6: Packaging and process monitoring technology
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Chapter title
Packaging and process monitoring technology
Chapter number 6
Book title
Introduction to VLSI Process Engineering
Published by
Springer Netherlands, January 1993
DOI 10.1007/978-94-011-1562-9_6
Book ISBNs
978-9-40-104682-4, 978-9-40-111562-9
Authors

The Society of Chemical Engineers of Japan

Editors

The Society of Chemical Engineers of Japan