You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
| Chapter title |
Process engineering aspects of VLSI production
|
|---|---|
| Chapter number | 8 |
| Book title |
Introduction to VLSI Process Engineering
|
| Published by |
Springer Netherlands, January 1993
|
| DOI | 10.1007/978-94-011-1562-9_8 |
| Book ISBNs |
978-9-40-104682-4, 978-9-40-111562-9
|
| Authors |
The Society of Chemical Engineers of Japan |
| Editors |
The Society of Chemical Engineers of Japan |