Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies
Article in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (August 2023)
The most recent citing publications are shown below. View all 19 publications that cite this research output on Dimensions.
Article in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (August 2023)
Article in Journal of Crystal Growth (June 2023)
Book (January 2023)