Title |
Effect of atomic layer deposition temperature on the performance of top-down ZnO nanowire transistors
|
---|---|
Published in |
Discover Nano, September 2014
|
DOI | 10.1186/1556-276x-9-517 |
Pubmed ID | |
Authors |
Suhana M Sultan, Nonofo J Ditshego, Robert Gunn, Peter Ashburn, Harold MH Chong |
Abstract |
This paper studies the effect of atomic layer deposition (ALD) temperature on the performance of top-down ZnO nanowire transistors. Electrical characteristics are presented for 10-μm ZnO nanowire field-effect transistors (FETs) and for deposition temperatures in the range 120°C to 210°C. Well-behaved transistor output characteristics are obtained for all deposition temperatures. It is shown that the maximum field-effect mobility occurs for an ALD temperature of 190°C. This maximum field-effect mobility corresponds with a maximum Hall effect bulk mobility and with a ZnO film that is stoichiometric. The optimized transistors have a field-effect mobility of 10 cm(2)/V.s, which is approximately ten times higher than can typically be achieved in thin-film amorphous silicon transistors. Furthermore, simulations indicate that the drain current and field-effect mobility extraction are limited by the contact resistance. When the effects of contact resistance are de-embedded, a field-effect mobility of 129 cm(2)/V.s is obtained. This excellent result demonstrates the promise of top-down ZnO nanowire technology for a wide variety of applications such as high-performance thin-film electronics, flexible electronics, and biosensing. |
Mendeley readers
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 28 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 8 | 29% |
Student > Master | 4 | 14% |
Student > Doctoral Student | 3 | 11% |
Lecturer > Senior Lecturer | 2 | 7% |
Researcher | 2 | 7% |
Other | 4 | 14% |
Unknown | 5 | 18% |
Readers by discipline | Count | As % |
---|---|---|
Materials Science | 9 | 32% |
Engineering | 6 | 21% |
Biochemistry, Genetics and Molecular Biology | 2 | 7% |
Chemistry | 2 | 7% |
Energy | 1 | 4% |
Other | 1 | 4% |
Unknown | 7 | 25% |