Title |
Nanoscale temperature mapping in operating microelectronic devices
|
---|---|
Published in |
Science, February 2015
|
DOI | 10.1126/science.aaa2433 |
Pubmed ID | |
Authors |
Matthew Mecklenburg, William A Hubbard, E R White, Rohan Dhall, Stephen B Cronin, Shaul Aloni, B C Regan |
Abstract |
Modern microelectronic devices have nanoscale features that dissipate power nonuniformly, but fundamental physical limits frustrate efforts to detect the resulting temperature gradients. Contact thermometers disturb the temperature of a small system, while radiation thermometers struggle to beat the diffraction limit. Exploiting the same physics as Fahrenheit's glass-bulb thermometer, we mapped the thermal expansion of Joule-heated, 80-nanometer-thick aluminum wires by precisely measuring changes in density. With a scanning transmission electron microscope and electron energy loss spectroscopy, we quantified the local density via the energy of aluminum's bulk plasmon. Rescaling density to temperature yields maps with a statistical precision of 3 kelvin/hertz(-1/2), an accuracy of 10%, and nanometer-scale resolution. Many common metals and semiconductors have sufficiently sharp plasmon resonances to serve as their own thermometers. |
X Demographics
Geographical breakdown
Country | Count | As % |
---|---|---|
United Kingdom | 3 | 27% |
United States | 2 | 18% |
France | 1 | 9% |
Netherlands | 1 | 9% |
Greece | 1 | 9% |
Unknown | 3 | 27% |
Demographic breakdown
Type | Count | As % |
---|---|---|
Members of the public | 10 | 91% |
Scientists | 1 | 9% |
Mendeley readers
Geographical breakdown
Country | Count | As % |
---|---|---|
United States | 10 | 2% |
United Kingdom | 2 | <1% |
Belgium | 2 | <1% |
Ireland | 1 | <1% |
Italy | 1 | <1% |
Netherlands | 1 | <1% |
Germany | 1 | <1% |
Spain | 1 | <1% |
Denmark | 1 | <1% |
Other | 0 | 0% |
Unknown | 402 | 95% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Student > Ph. D. Student | 135 | 32% |
Researcher | 86 | 20% |
Student > Master | 36 | 9% |
Professor > Associate Professor | 28 | 7% |
Professor | 24 | 6% |
Other | 62 | 15% |
Unknown | 51 | 12% |
Readers by discipline | Count | As % |
---|---|---|
Physics and Astronomy | 102 | 24% |
Engineering | 87 | 21% |
Materials Science | 84 | 20% |
Chemistry | 46 | 11% |
Agricultural and Biological Sciences | 7 | 2% |
Other | 22 | 5% |
Unknown | 74 | 18% |