Method for adjusting the stress state of a piezoelectric film and acoustic wave device… Grant US-11462676-B2 United States of America 04 Oct 2022
Relaxation and transfer of strained layers Application EP-2151852-B1 European Patent Office 15 Jan 2020
Semiconductor structures, devices and engineered substrates including layers of… Application US-9368344-B2 United States of America 14 Jun 2016
Strain relaxation using metal materials and related structures Application US-9312339-B2 United States of America 12 Apr 2016