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Multi-Wafer Rotating MEMS Machines

Overview of attention for book
Attention for Chapter 3: Materials, Structures and Packaging
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Chapter title
Materials, Structures and Packaging
Chapter number 3
Book title
Multi-Wafer Rotating MEMS Machines
Published by
Springer, Boston, MA, January 2009
DOI 10.1007/978-0-387-77747-4_3
Book ISBNs
978-0-387-77746-7, 978-0-387-77747-4
Authors

S. Mark Spearing

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Mendeley readers

The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 1 100%

Demographic breakdown

Readers by professional status Count As %
Other 1 100%
Readers by discipline Count As %
Engineering 1 100%