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Multi-Wafer Rotating MEMS Machines

Overview of attention for book
Attention for Chapter 2: System Design Considerations and Device Overview
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Chapter title
System Design Considerations and Device Overview
Chapter number 2
Book title
Multi-Wafer Rotating MEMS Machines
Published by
Springer, Boston, MA, January 2009
DOI 10.1007/978-0-387-77747-4_2
Book ISBNs
978-0-387-77746-7, 978-0-387-77747-4
Authors

Alan H. Epstein

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Researcher 1 50%
Other 1 50%
Readers by discipline Count As %
Engineering 2 100%