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Scanning Acoustic Microscopy as a Non-Destructive Technique for Process Monitoring of High Power Semiconductor Devices
Springer, Boston, MA, January 1992
J. Attal, B. Bianco, A. Cambiaso, D. E. Crees, P. Dargent, F. Fasce, D. R. Newcombe, J. C. Noack, J. M. Saurel, M. Zambelli