You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
| Chapter title |
Dry Etching for Micromachining Applications
|
|---|---|
| Chapter number | 7 |
| Book title |
MEMS Materials and Processes Handbook
|
| Published by |
Springer, Boston, MA, January 2011
|
| DOI | 10.1007/978-0-387-47318-5_7 |
| Book ISBNs |
978-0-387-47316-1, 978-0-387-47318-5
|
| Authors |
Srinivas Tadigadapa, Franz Lärmer |
Mendeley readers
The data shown below were compiled from readership statistics for 15 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| United States | 1 | 7% |
| Unknown | 14 | 93% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 5 | 33% |
| Student > Master | 2 | 13% |
| Researcher | 2 | 13% |
| Other | 1 | 7% |
| Student > Postgraduate | 1 | 7% |
| Other | 0 | 0% |
| Unknown | 4 | 27% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 8 | 53% |
| Physics and Astronomy | 2 | 13% |
| Social Sciences | 1 | 7% |
| Chemical Engineering | 1 | 7% |
| Unknown | 3 | 20% |