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MEMS Materials and Processes Handbook

Overview of attention for book
Attention for Chapter 10: Doping Processes for MEMS
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Citations

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Chapter title
Doping Processes for MEMS
Chapter number 10
Book title
MEMS Materials and Processes Handbook
Published by
Springer, Boston, MA, January 2011
DOI 10.1007/978-0-387-47318-5_10
Book ISBNs
978-0-387-47316-1, 978-0-387-47318-5
Authors

Alan D. Raisanen

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 3 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 3 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 1 33%
Other 1 33%
Unknown 1 33%
Readers by discipline Count As %
Engineering 2 67%
Unknown 1 33%