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MEMS Materials and Processes Handbook

Overview of attention for book
Attention for Chapter 9: MEMS Lithography and Micromachining Techniques
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Citations

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27 Mendeley
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Chapter title
MEMS Lithography and Micromachining Techniques
Chapter number 9
Book title
MEMS Materials and Processes Handbook
Published by
Springer, Boston, MA, January 2011
DOI 10.1007/978-0-387-47318-5_9
Book ISBNs
978-0-387-47316-1, 978-0-387-47318-5
Authors

Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, Reza Ghodssi

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 27 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 27 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 6 22%
Student > Master 4 15%
Unspecified 2 7%
Student > Postgraduate 2 7%
Other 2 7%
Other 1 4%
Unknown 10 37%
Readers by discipline Count As %
Engineering 7 26%
Unspecified 2 7%
Chemistry 2 7%
Materials Science 2 7%
Neuroscience 1 4%
Other 3 11%
Unknown 10 37%