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MEMS Materials and Processes Handbook

Overview of attention for book
Attention for Chapter 2: Additive Processes for Semiconductors and Dielectric Materials
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Citations

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22 Mendeley
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Chapter title
Additive Processes for Semiconductors and Dielectric Materials
Chapter number 2
Book title
MEMS Materials and Processes Handbook
Published by
Springer, Boston, MA, January 2011
DOI 10.1007/978-0-387-47318-5_2
Book ISBNs
978-0-387-47316-1, 978-0-387-47318-5
Authors

Christian A. Zorman, Robert C. Roberts, Li Chen

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 22 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
United States 1 5%
Unknown 21 95%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 9 41%
Student > Bachelor 2 9%
Researcher 2 9%
Student > Master 2 9%
Other 1 5%
Other 0 0%
Unknown 6 27%
Readers by discipline Count As %
Engineering 7 32%
Physics and Astronomy 3 14%
Chemistry 3 14%
Chemical Engineering 2 9%
Materials Science 1 5%
Other 0 0%
Unknown 6 27%