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MEMS Materials and Processes Handbook

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Cover of 'MEMS Materials and Processes Handbook'

Table of Contents

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    Book Overview
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    Chapter 1 The MEMS Design Process
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    Chapter 2 Additive Processes for Semiconductors and Dielectric Materials
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    Chapter 3 Additive Processes for Metals
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    Chapter 4 Additive Processes for Polymeric Materials
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    Chapter 5 Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
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    Chapter 6 Materials and Processes in Shape Memory Alloy
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    Chapter 7 Dry Etching for Micromachining Applications
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    Chapter 8 MEMS Wet-Etch Processes and Procedures
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    Chapter 9 MEMS Lithography and Micromachining Techniques
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    Chapter 10 Doping Processes for MEMS
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    Chapter 11 Wafer Bonding
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    Chapter 12 MEMS Packaging Materials
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    Chapter 13 Surface Treatment and Planarization
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    Chapter 14 MEMS Process Integration
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