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Chapter title |
Sensor Portfolio for Automotive Applications Based on Surface Micro-Machining with Thick Polysilicon
|
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Chapter number | 18 |
Book title |
Advanced Microsystems for Automotive Applications 2000
|
Published by |
Springer, Berlin, Heidelberg, January 2000
|
DOI | 10.1007/978-3-642-18146-7_18 |
Book ISBNs |
978-3-64-262107-9, 978-3-64-218146-7
|
Authors |
M. Keim, M. Offenberg, M. Illing, M. Schöfthaler, R. Schellin, D. Ullmann, Keim, M., Offenberg, M., Illing, M., Schöfthaler, M., Schellin, R., Ullmann, D. |