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| Chapter title |
Ultrasensitive In-Plane Resonant Nano-electromechanical Sensors
|
|---|---|
| Chapter number | 9 |
| Book title |
Nanoscale Sensors
|
| Published by |
Springer, Cham, January 2013
|
| DOI | 10.1007/978-3-319-02772-2_9 |
| Book ISBNs |
978-3-31-902771-5, 978-3-31-902772-2
|
| Authors |
Faezeh Arab Hassani, Yoshishige Tsuchiya, Adrian Mihai Ionescu, Hiroshi Mizuta |