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Chapter title |
Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography
|
---|---|
Chapter number | 36 |
Book title |
The Physics and Fabrication of Microstructures and Microdevices
|
Published by |
Springer, Berlin, Heidelberg, January 1986
|
DOI | 10.1007/978-3-642-71446-7_36 |
Book ISBNs |
978-3-64-271448-1, 978-3-64-271446-7
|
Authors |
G. Bernstein, D. K. Ferry |