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The Physics and Fabrication of Microstructures and Microdevices

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Cover of 'The Physics and Fabrication of Microstructures and Microdevices'

Table of Contents

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    Book Overview
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    Chapter 1 High Resolution Lithography (Some Comments on Limits and Future Possibilities)
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    Chapter 2 Submicron Lithography Tools
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    Chapter 3 Electron Beam Nanolithography
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    Chapter 4 The Spin Coating Process Mechanism
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    Chapter 5 Resists Patterning
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    Chapter 6 Dry Etching: Concepts, Methods and Applications
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    Chapter 7 Overlayers
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    Chapter 8 Self-Aligned Growth of Microstructures
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    Chapter 9 Laser-Induced Growth of Microstructures
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    Chapter 10 Structural Characterization of Superlattices by X-Ray Diffraction
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    Chapter 11 Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces
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    Chapter 12 Fabrication of Small Structures of Semiconductors and Metals
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    Chapter 13 Atomically Controlled Growth in 2, 1 and OD, and Applications
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    Chapter 14 Microstructure of Organic Mono- and Multilayers
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    Chapter 15 Fundamentals of Low Dimensional Physics
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    Chapter 16 Electron States in Semiconductor Microstructures
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    Chapter 17 Quantum Transport Theory for Small-Geometry Structures
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    Chapter 18 Noise in Microstructures
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    Chapter 19 Transport Physics of Multicontact Si MOS Nanostructures
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    Chapter 20 1D Structures — Field Confinement Approach
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    Chapter 21 Excitons in GaAs Quantum Wells: Interface Disorder and Mobility
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    Chapter 22 Nonlinear Optics and Electro-Optics of Quantum Wells
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    Chapter 23 Quantum Interference Effects in Small Systems: Normal and Superconducting Networks
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    Chapter 24 2D Localisation and Interaction Effects in Semiconductor Structures
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    Chapter 25 Optical Nonlinearities in Small Particles and Composite Materials
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    Chapter 26 Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers in the Presence of an Applied Magnetic Field
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    Chapter 27 Scaling Limits of Silicon VLSI Technology
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    Chapter 28 Three Part Series on Heterojunction Transistors
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    Chapter 29 CAD: Overview and Perspectives
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    Chapter 30 Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics
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    Chapter 31 The Metal Base Transistors
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    Chapter 32 An Integrated Microfabrication System for Low-Dimensionality Structures and Devices
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    Chapter 33 Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes
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    Chapter 34 Electronic Neural Computing
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    Chapter 35 Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure
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    Chapter 36 Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography
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    Chapter 37 2D Josephson Junction Networks
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    Chapter 38 Electric Field Heating of Supported and Free-Standing AuPd Fine Wires
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    Chapter 39 High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers
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    Chapter 40 Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode
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    Chapter 41 Disorder and Two-Dimensional Electronic Sub-Bands
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    Chapter 42 A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures
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    Chapter 43 A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem
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    Chapter 44 A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire
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    Chapter 45 The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors
Attention for Chapter 24: 2D Localisation and Interaction Effects in Semiconductor Structures
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Chapter title
2D Localisation and Interaction Effects in Semiconductor Structures
Chapter number 24
Book title
The Physics and Fabrication of Microstructures and Microdevices
Published by
Springer, Berlin, Heidelberg, January 1986
DOI 10.1007/978-3-642-71446-7_24
Book ISBNs
978-3-64-271448-1, 978-3-64-271446-7
Authors

M. Pepper