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Chapter title |
Study on Subsurface Damage Generated in Ground Si Wafer
|
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Chapter number | 54 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_54 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
Bahman Soltani Hosseini, Libo Zhou, Tatsuya Tsuruga, Jun Shimizu, Hiroshi Eda, Sumio Kamiya, Hisao Iwase, Hosseini, Bahman Soltani, Zhou, Libo, Tsuruga, Tatsuya, Shimizu, Jun, Eda, Hiroshi, Kamiya, Sumio, Iwase, Hisao |