You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Surface structure of monocrystalline silicon anisotropically etched with the help of microwaves
|
---|---|
Chapter number | 65 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_65 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
T. Krah, S. Büttgenbach, Krah, T., Büttgenbach, S. |