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Chapter title |
Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment
|
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Chapter number | 67 |
Book title |
Towards Synthesis of Micro-/Nano-systems
|
Published by |
Springer, London
, January 2007
|
DOI | 10.1007/1-84628-559-3_67 |
Book ISBNs |
978-1-84628-558-5, 978-1-84628-559-2
|
Authors |
Shinsuke Udagawa, Satoshi Takahashi, Daisuke Nakamura, Kazuo Maeno, Udagawa, Shinsuke, Takahashi, Satoshi, Nakamura, Daisuke, Maeno, Kazuo |