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| Chapter title |
The Litho-to-Nano link
|
|---|---|
| Chapter number | 6 |
| Book title |
Nanoscale Devices
|
| Published by |
Springer, Berlin, Heidelberg, January 2009
|
| DOI | 10.1007/978-3-540-92732-7_6 |
| Book ISBNs |
978-3-54-092731-0, 978-3-54-092732-7
|
| Authors |
Gianfranco Cerofolini, Cerofolini, Gianfranco |