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Chapter title |
Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas
|
---|---|
Chapter number | 29 |
Book title |
Microwave Discharges
|
Published by |
Springer, Boston, MA, January 1993
|
DOI | 10.1007/978-1-4899-1130-8_29 |
Book ISBNs |
978-1-4899-1132-2, 978-1-4899-1130-8
|
Authors |
M. R. Wertheimer, L. Martinu |