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| Chapter title |
Microsystems Material Properties
|
|---|---|
| Chapter number | 6 |
| Book title |
Process Variations in Microsystems Manufacturing
|
| Published by |
Springer, Cham, January 2020
|
| DOI | 10.1007/978-3-030-40560-1_6 |
| Book ISBNs |
978-3-03-040558-8, 978-3-03-040560-1
|
| Authors |
Michael Huff |