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Microsystem design

Overview of attention for book
Cover of 'Microsystem design'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 An Approach to Mems Design
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    Chapter 3 Microfabrication
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    Chapter 4 Process Integation
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    Chapter 5 Lumped Modeling with Circuit Elements
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    Chapter 6 Energy-conserving Transducers
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    Chapter 7 Lumped-element System Dynamics
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    Chapter 8 Elasticity
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    Chapter 9 Structures
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    Chapter 10 Energy Methods
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    Chapter 11 Dissipation and the Thermal Energy Domain
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    Chapter 12 Lumped Modeling of Dissipative Processes
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    Chapter 13 Fluids
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    Chapter 14 Electronics
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    Chapter 15 Feedback Systems
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    Chapter 16 Noise
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    Chapter 17 Packaging
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    Chapter 18 A Piezoresistive Pressure Sensor
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    Chapter 19 A Capacitive Accelerometer
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    Chapter 20 Electrostatic Projection Displays
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    Chapter 21 A Piezoelectric Rate Gyroscope
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    Chapter 22 Microsystems for DNA Amplification
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    Chapter 23 A Microbridge Combustible-gas Sensor
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