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New Generation Electron Beam Resists: A Review

Overview of attention for article published in Chemistry of Materials, February 2017
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About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (82nd percentile)
  • High Attention Score compared to outputs of the same age and source (90th percentile)

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Citations

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107 Dimensions

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