Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

Overview of attention for article published in Journal of Applied Physics, May 2012

Altmetric Badge

About this Attention Score

In the top 25% of all research outputs scored by Altmetric
Good Attention Score compared to outputs of the same age (76th percentile)
High Attention Score compared to outputs of the same age and source (83rd percentile)

So far, Altmetric has seen 5 patents that reference this research output.

This page shows the most recent patents that mention this research output.

Click here to find out how to access more activity, including 1 additional patents.