Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

Overview of attention for article published in Journal of Applied Physics, June 2009

Altmetric Badge

About this Attention Score

In the top 25% of all research outputs scored by Altmetric
High Attention Score compared to outputs of the same age (85th percentile)
High Attention Score compared to outputs of the same age and source (90th percentile)

Mentioned by

patent: 3 patents

Citations

dimensions_citation: 59 Dimensions

Readers on

mendeley: 58 Mendeley

Summary Patents Dimensions citations

So far, Altmetric has seen 3 patents that reference this research output.

METHOD OF DEPOSITION AN ADDITIVE-CONTAINING ALUMINIUM NITRIDE FILM, AN ADDITIVE-CONTAINING…

Application EP-3739077-A1

European Patent Office

Method for depositing a piezoelectric film containing AIN, and a piezoelectric film…

Grant US-9994950-B2

United States of America

METHOD FOR DEPOSITING A PIEZOELECTRIC FILM CONTAINING AIN, AND A PIEZOELECTRIC FILM…

Application WO-2015007466-A1

World Intellectual Property Organisation (WIPO)

This page shows the most recent patents that mention this research output.

Click here to find out how to access more activity.