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Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2O3–ZrO2 thin films

Overview of attention for article published in Journal of Vacuum Science & Technology: Part B, February 2006
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  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (86th percentile)

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5 patents

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