Extreme ultraviolet source with wide angle vapor containment and reflux Grant US-7479646-B2 United States of America 20 Jan 2009
Star pinch plasma source of photons or neutrons Grant US-6728337-B2 United States of America 27 Apr 2004
Star pinch X-ray and extreme ultraviolet photon source Grant US-6567499-B2 United States of America 20 May 2003
Extreme ultraviolet based on colliding neutral beams Grant US-6421421-B1 United States of America 16 Jul 2002