↓ Skip to main content

Novel hard, tough HfAlSiN multilayers, defined by alternating Si bond structure, deposited using modulated high-flux, low-energy ion irradiation of the growing film

Overview of attention for article published in Journal of Vacuum Science & Technology: Part B, May 2015
Altmetric Badge

Mentioned by

twitter
1 X user

Citations

dimensions_citation
7 Dimensions

Readers on

mendeley
15 Mendeley